VAT UHV Gate Valve SERIES 01032-KE21, KF40

Description

Like new. Excellent condition. Two available for sale. ,499.00 each.
The compact mini UHV gate valve featuring a modular actuator concept is well suited for industrial and R&D applications. It is often used in pipings of semiconductor process systems.
Factsheet
Inside diameter (ID) in mm (inch)
40 (1 1/2")
Flange
ISO-KF (compatible with ISO 2861 T1)
Body material
Stainless steel
Actuator
Pneumatic actuator with position indicator without solenoid valve single acting closing spring
Solenoid
No
Position indicator
Yes
Pressure min.
1•10-10 mbar
Pressure max.
2.0 bar (abs)
Feedthrough
Bellow
Sealing technology
MONOVAT-System
Sealhead Description
Metal
Sealing materials
FKM (VITON®)
Molecular flow conductance ls-1
160
Max. differential pressure closed position in bar
2
Max. pressure on seat side during opening in bar
0.03
Compressed air pressure max. in bar
7
Compressed air pressure min. in bar
4.5
Volume of air cylinder in l
0.06
Closing or opening time in sec.
0.7
Valve body temperature max. in °C
200
Actuator temperature max. in °C
200
Position Indicator temp. max. in °C
80
Weight in kg / lbs
1.8 / 3.97